Japan Intellectual Property Rights: SUBSTRATE CARRIER, DEPOSITION APPARATUS, DEPOSITION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

Japan, Jan. 20 -- CANON TOKKI CORP has got intellectual property rights for 'SUBSTRATE CARRIER, DEPOSITION APPARATUS, DEPOSITION METHOD, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE.' Other related details are as follows:

Application Number: JP,2021-121346

Category (FI): H10K59/65,H10K71/16,H10K71/10,H10K71/00,H10K59/10,H05B33/10,H05B33/14@A,H01L21/68@U,H10P72/50@F,H10P72/10@U,H10K71/16,166,H10K59/00,H10K50/10,H01L21/68@F,C23C14/50@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 26, 2021

Publication Date: Feb. 7, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....