Japan, Jan. 20 -- KIOXIA CORP has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING DEVICE.' Other related details are as follows:
Application Number: JP,2022-039499
Category (FI): C23C16/44@B,H01L21/318@B,H01L21/316@X,H10P14/60,101@C,H10P14/692@X,H10P14/694@B,H10P72/70,H01L21/31@C,H01L21/68@N
Stage: Grant (IP right document published.)
Filing Date: March 14, 2022
Publication Date: Sept. 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....