Japan, Oct. 30 -- MITSUBISHI ELECTRIC CORP has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2022-125354
Category (FI): C23C14/34@J
Stage: Grant (IP right document published.)
Filing Date: Aug. 5, 2022
Publication Date: Feb. 16, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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