Japan, Jan. 28 -- ATECO INC has got intellectual property rights for 'SEMICONDUCTOR DEVICE TRANSPORT UNIT, AND CHAMBER EXECUTING STEPS FOR SEMICONDUCTOR DEVICE INCLUDING SEMICONDUCTOR DEVICE TRANSPORT UNIT.' Other related details are as follows:
Application Number: JP,2024-147425
Category (FI): G01R31/26@Z
Stage: Grant (IP right document published.)
Filing Date: Aug. 29, 2024
Publication Date: March 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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