Japan, Jan. 28 -- MITSUBISHI ELECTRIC CORP has got intellectual property rights for 'SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2023-073949
Category (FI): C23C16/458,C30B25/20,C30B29/36@A,H01L21/302,101@Z,H10P50/20,101@Z
Stage: Grant (IP right document published.)
Filing Date: April 28, 2023
Publication Date: Nov. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....