Japan, Jan. 28 -- SUMITOMO CHEMICAL CO LTD has got intellectual property rights for 'SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN.' Other related details are as follows:
Application Number: JP,2022-011562
Category (FI): G03F7/20,521,G03F7/004,503@A,C07C381/12,C09K3/00@K,C07D307/00,C07D321/10,G03F7/039,601,G03F7/038,601,G03F7/20,501
Stage: Grant (IP right document published.)
Filing Date: Jan. 28, 2022
Publication Date: Aug. 24, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....