Japan, Nov. 17 -- ULVAC JAPAN LTD has got intellectual property rights for 'ROTARY CATHODE UNIT FOR SPUTTERING DEVICE.' Other related details are as follows:
Application Number: JP,2021-123099
Category (FI): C23C14/34@L
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 28, 2021
Publication Date: Feb. 9, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....