Japan, Oct. 30 -- EBARA CORP has got intellectual property rights for 'PUSHER, CONVEYANCE DEVICE AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-006511
Category (FI): H01L21/68@A,B24B41/06@A,B24B37/10
Stage: Grant (IP right document published.)
Filing Date: Jan. 19, 2022
Publication Date: July 31, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....