Japan, Oct. 30 -- CANON INC has got intellectual property rights for 'POSITIONING DEVICE, LITHOGRAPHY DEVICE, AND ARTICLE PRODUCTION METHOD.' Other related details are as follows:
Application Number: JP,2021-164935
Category (FI): G03F7/20,501,H01L21/68@G,H01L21/30,502@D,G03F7/20,521
Stage: Grant (IP right document published.)
Filing Date: Oct. 6, 2021
Publication Date: April 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....