Japan, Feb. 6 -- EBARA CORP has got intellectual property rights for 'POLISHING PAD, SUBSTRATE POLISHING DEVICE, AND MANUFACTURING METHOD OF POLISHING PAD.' Other related details are as follows:
Application Number: JP,2021-192301
Category (FI): B24B49/12,B24B37/26,B24B37/20,B24B37/12@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 26, 2021
Publication Date: June 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....