Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2025-012622
Category (FI): H05H1/46@L
Stage: Grant (IP right document published.)
Filing Date: Jan. 29, 2025
Publication Date: April 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....