Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2024-157382
Category (FI): H01L21/302,101@B,H01L21/302,101@D,H01L21/302,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 11, 2024
Publication Date: Dec. 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....