Japan, Nov. 11 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2020-194237
Category (FI): C23C14/54@B,H01L21/31@C,H01L21/302,101@G,C23C16/52,C23C16/50
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 24, 2020
Publication Date: June 3, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....