Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, CONTROL METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2025-049758
Category (FI): H01L21/302,101@B,H05H1/46@M,H05H1/46@R,H10P50/20,101@B
Stage: Grant (IP right document published.)
Filing Date: March 25, 2025
Publication Date: July 1, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....