Japan, Nov. 7 -- COMET TECHNOLOGY USA INC has got intellectual property rights for 'PLASMA NON-UNIFORMITY DETECTION.' Other related details are as follows:
Application Number: JP,2024-204624
Category (FI): H01L21/302,103,H05H1/00@A,H05H1/46@R
Stage: Grant (IP right document published.)
Filing Date: Nov. 25, 2024
Publication Date: Feb. 6
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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