Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA GENERATOR, AND FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD USING THE SAME.' Other related details are as follows:
Application Number: JP,2021-068588
Category (FI): C23C16/507,H05H1/46@L,H01L21/31@C
Stage: Grant (IP right document published.)
Filing Date: April 14, 2021
Publication Date: Oct. 26, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....