Japan, Jan. 28 -- JTEC CORP,OSAKA UNIV has got intellectual property rights for 'PLASMA-ASSISTED POLISHING METHOD AND DEVICE THEREOF.' Other related details are as follows:
Application Number: JP,2023-171213
Category (FI): B24B1/00@Z,B24D3/00,320@B,B24D3/14,B24D7/00@P,H01L21/304,621@Z,H01L21/304,622@F,H10P52/00@D,H10P52/00@Z,H10P54/30
Stage: Grant (IP right document published.)
Filing Date: Oct. 2, 2023
Publication Date: April 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....