Japan, Jan. 28 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'OPTICAL ELEMENT FOR REFLECTING VUV RADIATION AND OPTICAL DEVICE.' Other related details are as follows:
Application Number: JP,2024-110943
Category (FI): G03F7/20,502,G03F7/20,521,G02B5/08@A
Stage: Grant (IP right document published.)
Filing Date: July 10, 2024
Publication Date: Oct. 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....