Japan Intellectual Property Rights: MULTI-CHARGED PARTICLE BEAM DRAWING DEVICE AND MULTI-CHARGED PARTICLE BEAM DRAWING METHOD

Japan, Jan. 28 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'MULTI-CHARGED PARTICLE BEAM DRAWING DEVICE AND MULTI-CHARGED PARTICLE BEAM DRAWING METHOD.' Other related details are as follows:

Application Number: JP,2022-090905

Category (FI): G03F7/20,504,H01J37/147@C,H01J37/302,H01J37/305@B,H01J37/30@A,H01L21/30,541@E,H01L21/30,541@W,H10P76/00,541@E,H10P76/00,541@W

Stage: Grant (IP right document published.)

Filing Date: June 3, 2022

Publication Date: Dec. 14, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....