Japan Intellectual Property Rights: MULTI-CHARGE PARTICLE BEAM DRAWING DEVICE AND METHOD FOR DRAWING MULTI-CHARGE PARTICLE

Japan, Feb. 6 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'MULTI-CHARGE PARTICLE BEAM DRAWING DEVICE AND METHOD FOR DRAWING MULTI-CHARGE PARTICLE.' Other related details are as follows:

Application Number: JP,2022-035611

Category (FI): H10P76/00,541@W,H10P76/00,541@N,H10P76/00,541@D,H01L21/30,541@D,H01L21/30,541@W,H01L21/30,541@N

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 8, 2022

Publication Date: Sept. 21, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....