Japan, Feb. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'MOUNTING TABLE AND COMPONENTS FOR PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2024-157538
Category (FI): H01L21/302,101@G,C04B35/111,C04B35/569,H02N13/00@D,H10P50/20,101@G,H01L21/68@R,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 11, 2024
Publication Date: Nov. 28, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....