Japan Intellectual Property Rights: MOLYBDENUM TEMPLATE FOR TUNGSTEN

Japan, Jan. 28 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'MOLYBDENUM TEMPLATE FOR TUNGSTEN.' Other related details are as follows:

Application Number: JP,2022-141888

Category (FI): C23C16/14,C23C16/455,H01L21/28,301@R,H01L21/285@C,H01L21/88@B,H01L21/88@R,H01L27/108,671@B,H01L27/108,681@A,H01L27/11556,H01L27/11582,H01L29/78,371,H10B12/00,671@B,H10B12/00,681@A,H10B41/27,H10B43/27,H10D30/01,501,H10D30/68,H10D30/69,H10D64/23@Z,H10P14/43,H10W20/00@B,H10W20/44@R

Stage: Grant (IP right document published.)

Filing Date: Sept. 7, 2022

Publication Date: Dec. 6, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....