Japan, Nov. 17 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'METHOD AND APPARATUS FOR MASK REPAIR.' Other related details are as follows:
Application Number: JP,2023-031299
Category (FI): G03F1/74
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 1, 2023
Publication Date: Sept. 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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