Japan, Jan. 20 -- ROHM CO LTD has got intellectual property rights for 'MEMS SENSOR AND MANUFACTURING METHOD OF MEMS SENSOR.' Other related details are as follows:
Application Number: JP,2021-194817
Category (FI): H01L29/84@Z,G01P15/125@Z,G01P15/08,101@A,H10D48/50@Z
Stage: Grant (IP right document published.)
Filing Date: Nov. 30, 2021
Publication Date: June 9, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....