Japan, Nov. 7 -- AIMECHATEC LTD has got intellectual property rights for 'LIGHT IRRADIATION DEVICE AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-018870
Category (FI): H01L21/30,571,G03F7/023
Stage: Grant (IP right document published.)
Filing Date: Feb. 7
Publication Date: April 17
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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