Japan Intellectual Property Rights: LEARNING DEVICE, INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, LEARNING METHOD, RECIPE DETERMINATION METHOD, AND LEARNING PROGRAM

Japan, Jan. 27 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'LEARNING DEVICE, INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, LEARNING METHOD, RECIPE DETERMINATION METHOD, AND LEARNING PROGRAM.' Other related details are as follows:

Application Number: JP,2021-154403

Category (FI): H10P50/60@J,H01L21/306@J

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 22, 2021

Publication Date: April 3, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....