Japan, Nov. 11 -- ASM IP HOLDING BV has got intellectual property rights for 'INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN REACTION CHAMBER OF SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2021-191186

Category (FI): C23C16/455,H01L21/22,511@S,H01L21/324@R,H01L21/31@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 25, 2021

Publication Date: June 9, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....