Japan, Nov. 11 -- ASM IP HOLDING BV has got intellectual property rights for 'INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN REACTION CHAMBER OF SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-191186
Category (FI): C23C16/455,H01L21/22,511@S,H01L21/324@R,H01L21/31@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 25, 2021
Publication Date: June 9, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....