Japan Intellectual Property Rights: INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC UNIT, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS, ARITHMETIC UNIT, AND INFORMATION ACQUISITION METHOD FOR SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-022862

Category (FI): B05C11/10,H01L21/30,564@C,H01L21/30,569@C,H10P76/00,564@C,H10P76/00,569@C,B05C11/08

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 17, 2022

Publication Date: Oct. 17, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....