Japan, Jan. 28 -- CANON INC has got intellectual property rights for 'HOLDING DEVICE, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2022-024019
Category (FI): G03F7/20,521,H01L21/68@N,H10P72/70
Stage: Grant (IP right document published.)
Filing Date: Feb. 18, 2022
Publication Date: Aug. 30, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....