Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEATING PROCESSING DEVICE, HEATING PROCESSING METHOD, AND COMPUTER STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2022-072230
Category (FI): H01L21/30,567,H01L21/324@Q,H10P76/00,567,H10P95/90,101@Q
Stage: Grant (IP right document published.)
Filing Date: April 26, 2022
Publication Date: Nov. 8, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....