Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FOREIGN MATTER DETECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS AND FOREIGN MATTER DETECTION METHOD.' Other related details are as follows:

Application Number: JP,2023-199000

Category (FI): G01N21/85@B,G01N15/075,G01N15/06@E

Stage: Grant (IP right document published.)

Filing Date: Nov. 24, 2023

Publication Date: Feb. 14, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....