Japan, Jan. 28 -- CANON TOKKI CORP has got intellectual property rights for 'FILM THICKNESS MEASUREMENT DEVICE, DEPOSITION DEVICE, FILM THICKNESS MEASUREMENT METHOD AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE.' Other related details are as follows:
Application Number: JP,2022-118124
Category (FI): C23C14/54,G01B11/06@Z,G09F9/00,338
Stage: Grant (IP right document published.)
Filing Date: July 25, 2022
Publication Date: Feb. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....