Japan, Nov. 7 -- TOCALO CO LTD has got intellectual property rights for 'FILM DEPOSITION MATERIAL SUITABLE FOR PLASMA ETCHING DEVICE MEMBER, ETC. AND METHOD FOR MANUFACTURING THE SAME.' Other related details are as follows:
Application Number: JP,2024-066355
Category (FI): C23C14/08@K,C23C14/08,H01L21/31@F,H01L21/31@C,H01L21/302,101@G,C23C4/11
Stage: Grant (IP right document published.)
Filing Date: April 16, 2024
Publication Date: July 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....