Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2022-130185
Category (FI): C23C16/455,H10P14/694@B,H01L21/31@B,H10P14/60,101@B,H01L21/318@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 17, 2022
Publication Date: March 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....