Japan, Feb. 6 -- CANON TOKKI CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2021-202745
Category (FI): H01L21/68@A,H10P72/30@A,C23C14/54@A,C23C14/56@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 14, 2021
Publication Date: June 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....