Japan, Jan. 27 -- CANON INC has got intellectual property rights for 'EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:

Application Number: JP,2022-007910

Category (FI): G03F9/00@Z,G03F7/20,501

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 21, 2022

Publication Date: Aug. 2, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....