Japan, Oct. 30 -- TOSHIBA CORP has got intellectual property rights for 'ETCHING METHOD.' Other related details are as follows:
Application Number: JP,2021-149341
Category (FI): H01L21/308@B,H01L21/306@B,H01L21/308@C
Stage: Grant (IP right document published.)
Filing Date: Sept. 14, 2021
Publication Date: March 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....