Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-134371
Category (FI): H01L21/302,101@B,H01L21/302,105@A
Stage: Grant (IP right document published.)
Filing Date: Aug. 25, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....