Japan, Feb. 6 -- GSEC GERMAN SEMICONDUCTOR EQUIPMENT COMPANY GMBH has got intellectual property rights for 'DEVICE FOR CLEANING POT-SHAPED HOLLOW BODY, SPECIFICALLY TRANSPORTATION CONTAINER FOR SEMICONDUCTOR WAFER OR EUV EXPOSURE MASK.' Other related details are as follows:
Application Number: JP,2024-139229
Category (FI): H10P70/00,103@D,H01L21/304,648@E,H01L21/304,643@D,B08B3/02@D,H10P70/00,108@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 20, 2024
Publication Date: Nov. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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