Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DETECTION METHOD.' Other related details are as follows:
Application Number: JP,2024-139952
Category (FI): C23C16/455,C23C16/52,H01L21/318@B,H01L21/31@C
Stage: Grant (IP right document published.)
Filing Date: Aug. 21, 2024
Publication Date: Oct. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....