Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2021-139585
Category (FI): H01L21/316@X,C23C16/44@J,C23C16/511,H01L21/318@C,H01L21/318@B,H01L21/31@C
Stage: Grant (IP right document published.)
Filing Date: Aug. 30, 2021
Publication Date: March 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....