Japan, Jan. 20 -- AGC INC has got intellectual property rights for 'CLEANING TANK, CLEANING MACHINE, CLEANING METHOD, MANUFACTURING METHOD OF GLASS SUBSTRATE, AND MANUFACTURING METHOD OF MASK BLANK FOR EXTREME ULTRA-VIOLET LITHOGRAPHY.' Other related details are as follows:
Application Number: JP,2022-030237
Category (FI): H01L21/304,643@D,B08B3/08@Z,H10P70/00,103@D,B08B3/12@C,B08B3/02@B
Stage: Grant (IP right document published.)
Filing Date: Feb. 28, 2022
Publication Date: Sept. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....