Japan, Jan. 20 -- AGC INC has got intellectual property rights for 'CLEANING TANK, CLEANING MACHINE, CLEANING METHOD, MANUFACTURING METHOD OF GLASS SUBSTRATE, AND MANUFACTURING METHOD OF MASK BLANK FOR EXTREME ULTRA-VIOLET LITHOGRAPHY.' Other related details are as follows:

Application Number: JP,2022-030237

Category (FI): H01L21/304,643@D,B08B3/08@Z,H10P70/00,103@D,B08B3/12@C,B08B3/02@B

Stage: Grant (IP right document published.)

Filing Date: Feb. 28, 2022

Publication Date: Sept. 7, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....