Japan, Oct. 30 -- TOKYO OHKA KOGYO CO LTD has got intellectual property rights for 'CLEANING LIQUID, AND METHOD FOR CLEANING SUBSTRATE.' Other related details are as follows:
Application Number: JP,2021-214865
Category (FI): H01L21/304,647@A,H01L21/304,647@B,C11D3/30
Stage: Grant (IP right document published.)
Filing Date: Dec. 28, 2021
Publication Date: July 10, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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