Japan, Jan. 28 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2024-201385
Category (FI): H10P14/60,101@B,H01L21/31@B,H01L21/302,101@M,H01L21/302,101@G,H10P50/20,101@G,H10P50/20,101@M
Stage: Grant (IP right document published.)
Filing Date: Nov. 19, 2024
Publication Date: Feb. 19, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....