Japan, Jan. 28 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING.' Other related details are as follows:
Application Number: JP,2024-166834
Category (FI): H02N13/00@D,H05H1/46@R,C23C16/52,C23C16/509,H10P14/24,H01L21/68@R,H01L21/205,B23Q3/15@D
Stage: Grant (IP right document published.)
Filing Date: Sept. 26, 2024
Publication Date: Jan. 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....