Japan, Jan. 28 -- APPLIED MATERIALS INC has got intellectual property rights for 'CHEMICAL-MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL.' Other related details are as follows:
Application Number: JP,2024-109325
Category (FI): B24B37/015,B24B37/12@D,B24B37/28,B24B49/14,H01L21/304,622@R,H10P52/00@U,H10P52/40
Stage: Grant (IP right document published.)
Filing Date: July 8, 2024
Publication Date: Oct. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....