Japan, Feb. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-017003
Category (FI): H01L21/306@B,H01L21/304,648@Z,H01L21/304,643@A,H01L21/68@G,H10P50/60@A,H01L21/306@K,H10P72/50@G,H10P70/00,108@Z,H10P70/00,103@A,H10P50/60@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 7, 2022
Publication Date: Aug. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....