Japan, Nov. 7 -- YAYATECH CO LTD has got intellectual property rights for 'APPARATUS FOR CLEANING BLUE FILM ON BOTTOM PORTION OF WAFER.' Other related details are as follows:
Application Number: JP,2024-068415
Category (FI): H01L21/304,644@Z
Stage: Grant (IP right document published.)
Filing Date: April 19, 2024
Publication Date: Jan. 23
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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