Japan, Jan. 28 -- SUMITOMO HEAVY IND LTD has got intellectual property rights for 'ANNEALING DEVICE CONTROLLER, ANNEALING DEVICE, AND ANNEALING METHOD.' Other related details are as follows:
Application Number: JP,2021-115132
Category (FI): H01L21/265,602@C,H01L21/268@G,H10P30/28@M,H10P34/42@G
Stage: Grant (IP right document published.)
Filing Date: July 12, 2021
Publication Date: Jan. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....